Deformations of Microprofile in Electropolishing
نویسندگان
چکیده
منابع مشابه
Water diffusion coefficients during copper electropolishing
Cu electropolishing was studied using a rotating disc electrode in a variety of phosphoric acid-based electrolytes, including several with ethanol and other species added as diluents. Diluents allow a wider range of water concentrations and electrolyte viscosities to be accessed and also reduce the removal rate during Cu electropolishing, simplifying possible application to damascene processing...
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Precision Engineering
سال: 1956
ISSN: 0374-3543
DOI: 10.2493/jjspe1933.22.54